发明名称 PLASMA ION MASS SPECTROMETRY DEVICE AND METHOD THEREOF
摘要 PROBLEM TO BE SOLVED: To provide a plasma ion mass spectrometry device and method which enables introduction of sample ion to a mass spectrometer by maintaining plasma temperature high as well as preventing degradation of ion generation volume due to plasma temperature fall while carrying out shielding of electromagnetic wave from the surroundings of an apparatus or cooling it. SOLUTION: With a plasma ion mass spectrometry device provided with a plasma ion source for ionizing an analysis sample by plasma, a mass spectrometer carrying out mass spectrometry on the ionized sample and an interface having a sampling cone with a narrow hole for introducing plasma including the ionized sample into the mass spectrometer, the sampling cone is equipped with a flat plate part and a cone part with narrow holes formed in continuity with the flat plate, and at least the cone part is made of ceramics, and at least a part other than the cone part of the sampling cone is equipped with a shielding member for shielding magnetic wave, which combines a role of a coolant having a hollow part with larger diameter than that of plasma.
申请公布号 JP2002008584(A) 申请公布日期 2002.01.11
申请号 JP20000193011 申请日期 2000.06.27
申请人 HITACHI LTD 发明人 NEMOTO HIROKI;YASUDA AKIYOSHI;OKUMOTO TOYOJI
分类号 G01N27/62;H01J49/04;H01J49/26;(IPC1-7):H01J49/04 主分类号 G01N27/62
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