| 摘要 |
PROBLEM TO BE SOLVED: To provide a device and a method for manufacturing an information recording disk to effectively prevent production of particles in a PCVD chamber for formation of a carbon film and to improve the productivity, and to provide a method for plasma ashing to efficiently remove a carbon deposition film. SOLUTION: The device is equipped with a plurality of vacuum chambers including the PCVD chamber where high frequency power is supplied to electrodes disposed inside to generate plasma to form a carbon film on a substrate, and in the device and the method for the manufacture of an information recording disk, a substrate mount carrier is moved on rails disposed in each vacuum chamber from one chamber to another chamber while the substrate is subjected to a specified treatment in each chamber. Oxygen gas is introduced into the PCVD chamber and high frequency electric power is supplied to the electrodes to generate oxygen plasma, while negative bias voltage is applied on the rails in the chamber to remove a carbon film depositing inside of the chamber.
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