| 摘要 |
PROBLEM TO BE SOLVED: To provide a stage device and an exposure device which use a linear motor which eliminates an influence on a positioning accuracy, thermal deformation of structure, measurement error of a laser interferometer and the like by suppressing heating of coil of linear motor, and the manufacturing method and the like of the devices. SOLUTION: In the linear motor which has a coil and a jacket which covers the coil and of which internal space a coolant is supplied, the jacket has a structure of a double jacket consisting of inside jacket sheets 4, 4' and outside jacket sheets 7, 7'. Heat generated from the coil 1 is conducted to the inside jacket sheets 4, 4' by closely fixing the inside jacket sheets 4, 4' and the coil 1, and the heat generated from the coil 1 is released outside by the coolant flowing through the double jacket.
|
