| 发明名称 |
CERAMIC HEATER FOR SEMICONDUCTOR MANUFACTURING AND INSPECTING DEVICE |
| 摘要 |
PROBLEM TO BE SOLVED: To provide a ceramic heater having a resistant heating body with small secular change of a value of resistance. SOLUTION: This ceramic heater comprises the resistant heating body formed on a surface of a ceramic substrate, and it is characterized by that the resistant heating body is not covered but exposed. |
| 申请公布号 |
JP2002008827(A) |
申请公布日期 |
2002.01.11 |
| 申请号 |
JP20000189702 |
申请日期 |
2000.06.23 |
| 申请人 |
IBIDEN CO LTD |
发明人 |
HIRAMATSU YASUJI;ITO YASUTAKA;IDO YOSHIYUKI |
| 分类号 |
H05B3/20;H01L21/027;H01L21/66;H05B3/10;H05B3/16;(IPC1-7):H05B3/10 |
主分类号 |
H05B3/20 |
| 代理机构 |
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