摘要 |
PROBLEM TO BE SOLVED: To obtain a semiconductor integrated circuit provided with a test circuit in which an abnormal contact resistance part is detected by a circuit incorporated in a semiconductor chip, an ohmic characteristic of the contact part is restored by applying over-voltage, and a defective chip is relieved. SOLUTION: In a semiconductor substrate, an abnormal contact resistance part is detected by switching potentials of a node CP1, a node CP2, and a P well to Vxx, GND, Vxx/2 respectively by an external control signal through respective switching circuits, while over-voltage can be applied to said part, therefore, dielectric breakdown of a parasitic capacitor of a defective CP contact can be performed, while preventing the dielectric breakdown of a dielectric film 53 of a capacitor.
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