摘要 |
PROBLEM TO BE SOLVED: To the output of picture elements adjacent to a defective picture element by laser repair to achieve both of stabilized image quality and improvement in the manufacturing yield of the converter in a photoelectric converter in which a read circuit and a signal transfer line are electrically disconnected. SOLUTION: Of the spots 511 to 516, those to be actually repaired are radiated with laser to cut a surface protection film, an electrode layer forming signal transfer line 508, an N+ type a-Si layer, an a-Si layer, and an a-SiNx film to become an insulation layer. It is preferable that these laser repair spots are near the crossing spots of signal transfer line 508 and gate bias lines 505, and do not give such an influence as disconnection to the gate bias lines 505. The laser repair for crossing spots of signal transfer line 508 and gate bias lines 505 may be applied to all the signal transfer lines 508 that are electrically separated from the read circuit. Alternatively, the repair need not be applied to all the spots, and may be limited to the extent which no longer affect the image quality.
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