发明名称 RESINE RETICULEE ET PROCEDE DE FABRICATION D'OXYDES UTILISANT CETTE RESINE RETICULEE
摘要 The invention concerns a crosslinked resin and its use for making ceramic or glass patterns at the surface of a substrate. Said resin is obtained by mixing in a solvent one or several simple or complex metal or silicon alkoxides, acetylacetone and hexamethylene tetramine, then heating and subjecting said mixture to an exposure. The invention is applicable to ferroelectric storage units, integrated capacitors, piezoelectric transducers.
申请公布号 FR2811317(A1) 申请公布日期 2002.01.11
申请号 FR20000008920 申请日期 2000.07.07
申请人 THOMSON CSF 发明人 GAUCHER PHILIPPE
分类号 H01L21/02;H01L21/314;H01L21/316;(IPC1-7):C04B35/01;C03B8/00;C04B35/624;C04B35/49;H01G4/12;H01L41/18;H01B3/12 主分类号 H01L21/02
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