发明名称 CARBONATE-BASED PHOTORESIST STRIPPING COMPOSITIONS
摘要 Compositions useful for removing photoresist from a surface that are less corrosive and do not cause skin irritation. Such compositions comprise an alkylene carbonate, and optionally, either an alcohol, glycol ether, or a dibasic ester. The compositions may also further include water or hydrogen peroxide. Additionally, a method of removing photoresist from a surface. The method involves contacting the surface with an effective amount of a composition that comprises: an alkylene carbonate; optionally, either an alcohol, glycol ether, or a dibasic ester; and, optionally, water or hydrogen peroxide, and allowing the composition to contact the surface for a period of time and under conditions effective to cause the removal of the photoresist from the surface.
申请公布号 WO0203143(A2) 申请公布日期 2002.01.10
申请号 WO2001US41033 申请日期 2001.06.14
申请人 HUNTSMAN PETROCHEMICAL CORPORATION 发明人 MACHAC, JAMES, R., JR.;MARQUIS, EDWARD, T.
分类号 G03F7/42 主分类号 G03F7/42
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