DEVICE FOR DEFLECTING OPTICAL BEAMS

摘要

The invention relates to a device for the deflection of optical beams (25), provided with a piezo-plate (14), which has piezoelectric regions (15, 16), controlled by piezo electrodes (20, 21). At least one end section (22) of the piezo plate (14) is free of piezo electrodes (20, 21), whereby said free end section (22) is of a size, corresponding to the dimensions of the beams falling thereon. A deflection is thus achieved which leaves the wavefronts of the beams (25) essentially undisturbed.