发明名称 Gas supplying device for vacuum pump
摘要 Fixed throttle devices 36A, 36B, 36C, 36D are screw-engaged with a rotor housing 12. A fixed throttle device 37 is screw-engaged with a front housing 13, and a fixed throttle device 38 is screw-engaged with a rear housing 14. Inert gas is supplied to the respective throttle devices 36A, 36B, 36C, 36D, 37 and 38 via branch pipes 54 to 59. Each of the throttle devices 36A, 36B, 36C, 36D, 37 and 38 includes a check valve 44, a fixed throttle 45 screw-engaged with the check valve 44, and a pipe joint 46 screw-engaged with the check valve 44.
申请公布号 US2002004016(A1) 申请公布日期 2002.01.10
申请号 US20010841742 申请日期 2001.04.25
申请人 SUZUKI YOSHINARI;GOTO NAOKI;KUWAHARA MAMORU 发明人 SUZUKI YOSHINARI;GOTO NAOKI;KUWAHARA MAMORU
分类号 F04C25/02;F04B37/16;F04C18/12;F04C23/00;F04C29/00;F04C29/12;(IPC1-7):F04C18/18;F04C29/08 主分类号 F04C25/02
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