APPARATUS FOR DRIVING XYZ-AXIS OF WIRE BONDER AND METHOD FOR CONTROLLING POSITION OF SUCH DRIVING APPARATUS

摘要

PURPOSE: An apparatus for driving an XYZ-axis of a wire bonder is provided to minutely drive an XYZ stage by directly installing a linear motor capable of moving in a straight line in the XYZ stage while not using an additional straight line converting apparatus. CONSTITUTION: A linear guide member guides an X-axis motion and a Y-axis motion. An X-axis and Y-axis driving unit generates inductive electromotive force by using power and supplies straight transfer force to the linear guide member in an XY-axis direction which is a horizontal and vertical direction. A Z-axis driving unit generates induced electromotive force by using the applied power and supplies Z-axis straight driving force to a transfer block of a bonding head. A hinge unit converts the straight driving force of the Z-axis driving unit into revolving force to become the center of a rotation position so that the transfer block of the bonding head rotates in the opposite direction to a wire clamp.