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发明名称
STEMPEL FÜR LITHOGRAPHIE-VERFAHREN
摘要
申请公布号
DE69524247(D1)
申请公布日期
2002.01.10
申请号
DE19956024247
申请日期
1995.08.04
申请人
INTERNATIONAL BUSINESS MACHINES CORP., ARMONK
发明人
BIEBUYCK, ANDRE;MICHEL, BRUNO
分类号
B41K1/02;B41C1/02;B41K1/00;C23F1/00;G03F7/00;H01L21/20;H01L21/306;H01L21/768;(IPC1-7):B41K1/00
主分类号
B41K1/02
代理机构
代理人
主权项
地址
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