| 发明名称 |
SEMICONDUCTOR DEVICE WITH LIGHT SHIELD AND CORRESPONDING ETCHING METHOD |
| 摘要 |
<p>A semiconductor device and a display device comprising a gate electrode, an amorphous silicon film or a polysilicon film formed under the gate electrode, and a light shielding film formed under the amorphous silicon film or the polysilicon film, the light shielding film having titanium nitride.</p> |
| 申请公布号 |
WO0169654(A3) |
申请公布日期 |
2002.01.10 |
| 申请号 |
WO2001EP02426 |
申请日期 |
2001.03.05 |
| 申请人 |
KONINKLIJKE PHILIPS ELECTRONICS N.V.;HATTA, YOSHIHISA |
发明人 |
HATTA, YOSHIHISA |
| 分类号 |
H01L21/302;H01L21/3065;H01L21/336;H01L29/786;(IPC1-7):H01L29/786 |
主分类号 |
H01L21/302 |
| 代理机构 |
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