| 摘要 |
PURPOSE: Equipment for manufacturing a semiconductor is provided to prevent a process from being further performed while a wafer boat is in an abnormal position, by detecting whether the wafer boat is inclined or is eccentric from a designated position. CONSTITUTION: A wafer cassette wherein a plurality of wafers are loaded, is loaded to a wafer cassette loader. A predetermined semiconductor process is performed in a process chamber receiving the wafers. The wafers received in the wafer cassette loader is loaded to the wafer boat(20). A wafer boat chuck has a chuck(269d) which transfers the wafer boat to the process chamber and to the wafer cassette loader while gripping a handle(26) installed at both ends of the wafer boat. When the chuck grips the handle, the horizontal direction position of the wafer boat and the inclination of the wafer boat are detected. A wafer boat horizontality/inclination detecting unit forcibly stops the transfer of the wafer boat when the horizontal position and inclination of the wafer boat are defective.
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