Pressure sensor has conductive elevations that are arranged in between opposing surfaces of shaft and sensor chip, thereby connecting sensor chip to guides

摘要

Guides (2) extend away from the surface (1a) of a shaft (1). Conductive elevations (8) are formed on the surface (4a) of a sensor chip (4) having a diaphragm (5) that generates an electrical signal corresponding to a physical value. The surfaces (1a,4a) are opposite each other, with the elevations arranged in between such that the sensor chip is connected to the guides through the elevations.