| 发明名称 |
METHOD AND APPARATUS FOR APPLICATION OF PROXIMITY CORRECTION WITH UNITARY SEGMENTATION |
| 摘要 |
The present invention is a method and apparatus for applying proximity correction to a piece of a mask pattern, by segmenting the piece into a plurality of segments, and applying proximity correction to a first segment without taking into consideration the other segments of the piece.
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| 申请公布号 |
US2002004714(A1) |
申请公布日期 |
2002.01.10 |
| 申请号 |
US19980034544 |
申请日期 |
1998.03.03 |
| 申请人 |
JONES EDWIN;PETRANOVIC DUSAN;SCEPANOVIC RANKO;SCHINELLA RICHARD;PASCH NICHOLAS F.;GARZA MARIO;CHAO KEITH K.;JENSEN JOHN V.;EIB NICHOLAS K. |
发明人 |
JONES EDWIN;PETRANOVIC DUSAN;SCEPANOVIC RANKO;SCHINELLA RICHARD;PASCH NICHOLAS F.;GARZA MARIO;CHAO KEITH K.;JENSEN JOHN V.;EIB NICHOLAS K. |
| 分类号 |
G03F1/14;G03F7/20;(IPC1-7):G06F17/50 |
主分类号 |
G03F1/14 |
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