SPIN DRYER

摘要

PURPOSE: A spin dryer is provided to increase a yield of the products by previously sensing a breaking of a driving belt in a spin dry process for removing a moisture on a wafer and by preventing a watermark occurred when a moisture of a wafer can not dried adequately. CONSTITUTION: A rotation speed detector is shown a rotating speed of a driving motor(16) in combination with signals according to the rotating speed of the driving motor. A belt break sensor(21) is determined whether the belt(17) is broken or not based on an output voltage of the rotating speed detector. The rotating speed detector is composed of an encoder(18) connected to a driving axis for combining the signals according to the rotating speed of the driving motor(16) and a rotating speed display(20) for converting signals from the encoder(18) into digital signals and for indicating the rotating speed of the driving motor.