METHOD FOR STABILIZING SURFACE OF IRIDIUM OR RUTHENIUM ELECTRODE

摘要

PURPOSE: A method for stabilizing the surface of an iridium or ruthenium electrode is provided to prevent additional oxidation of a lower electrode in a heat treatment process for crystallizing ferroelectrics, by using NH3 or O3 plasma to form a uniform oxide or nitride layer on the surface of the iridium or ruthenium electrode. CONSTITUTION: The capacitor lower electrode made of an iridium layer is formed. A plasma treatment process is performed regarding the capacitor lower electrode to form a surface reforming layer(29) on the surface of the lower electrode. A dielectric layer is formed on the lower electrode. A capacitor upper electrode is formed on the dielectric layer.