| 摘要 |
A capacity type pressure sensor, comprising a first substrate (1), a first flat plate electrode (1a) disposed on the first substrate (1), a pressure-sensing frame part (4) surrounding the first flat plate electrode (1a) provided on the first substrate (1), second substrates (2, 3) connected to the pressure sensing frame part (4) opposedly to the first substrate (1) and forming a capacity chamber (7) together with the first substrate (1) and the pressure-sensing frame part (4), a stage (5) provided on the second substrates (2, 3) in the capacity chamber (7), separated from the pressure-sensing frame part (4), and opposed to and separated from the first flat plate electrode (1a), and a second flat plate electrode (2a) provided on the stage (5) and opposed to the first flat plate electrode (1a), wherein the pressure-sensing frame part (4) is deformed elastically according to a pressure applied to the first and second substrates (1, 2, 3).
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