| 摘要 |
<p>The device has at least one electron cyclotron resonance ion source (1) with a central, axis-parallel passage/opening and at least one device for laser induced damping of material within the vacuum inclusion and at least one gas feed device. The device has at least one laser damping chamber. Independent claims are also included for the following: a method of coating and/or implantation in materials and/or human or animal tissues.</p> |
