| 摘要 |
PROBLEM TO BE SOLVED: To provide a microscope concurrently having an ultraviolet light observing function and a visible light observing function and also having an automatic focusing function. SOLUTION: This microscope is provided with objective lenses 2 and 3 and automatic focusing parts 15 to 23 detecting the out-of-focus of the lenses 2 and 3. As for the lenses 2 and 3, either the lens for visible light 3 for visible light observation or the lens for ultraviolet light 2 for ultraviolet light observation is selectively arranged in the detection optical path of the microscope. The focusing parts 15 to 23 are constituted to radiate near infrared light to a surface to be inspected through the objective lens arranged selectively, and receive and detect reflected light therefrom. Chromatic aberration is compensated between the ultraviolet light and the near infrared light in the lens 2. |
