UNIT SLOT VALVE ACTUATOR WITH DUAL VALVE AND ITS MOUNTING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a unit slot valve actuator in a vacuum container between adjacent vacuum chambers, with separate valves set on the unit actuator for slots of two valve vacuum containers in such a manner that each of the vacuum container slots is open/closed depending on the position of the unit actuator. SOLUTION: Individual valves are provided for keeping a carrying module in a vacuum condition while the adjacent treatment modules being open to the air is made ready for repair.