| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and device for measuring distance between surfaces with high accuracy, which measures thickness and distance between surfaces of a lens, in other words, a surface position through nondestructive and noncontact manner. SOLUTION: Related to an interferometer which uses a light source 1 of short coherence, a mirror-driving device 7 is provided where, with an object 530 which is to be inspected provided on an optical path of the interferometer, two optical paths (l) and (m) are provided and the length of optical path is changed, based on the positional relationship between a mirror 3 and a beam splitter 542. Two beams, passing through respective optical paths, are made to interfere each other to enter a photoelectric detector 8 for acquiring surface position, eccentricity, surface shape or physical characteristics of the object.
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