VERY STRONG ORGANIC ACID GENERATOR

摘要

PROBLEM TO BE SOLVED: To provide a very strong organic acid generator, a composition containing the generator and having reactivity to active energy beams and a polymer pattern forming method using the composition. SOLUTION: The organic very strong acid generator comprises a cyclohexane derivative of formula (1) (where X is H or F; R1 is a substituent having an aromatic substituent constant σ1 of +0.00 to +0.70 and is situated in the 3- and/or 4-position relative to the substituent -OSO2[CX2]tCF3; R2 is a substituent having an aromatic substituent constant σ1 of -0.03 to +0.70; (t) is an integer of 0 or 1; (n) is an integer of 1 or 2; (m) is an integer of 0-4; and n+m=1-5).