发明名称 OPTICAL WAVEGUIDE PROBE, ITS MANUFACTURING METHOD AND SCANNING-TYPE NEAR FIELD MICROSCOPE
摘要 PROBLEM TO BE SOLVED: To obtain an optical waveguide probe which is used for scanning-type near field microscopes, low in optical transmission loss, and workable in AFM operation; and its manufacturing method. SOLUTION: The area around the front end of an optical waveguide 2 bends in a direction toward the detecting needle part 9 side with the faces being symmetrical to the surface including the optical axis of the optical waveguied 2. By this, the loss of the transmission light 7 at the bent part 10 is reduced, and the transmission light 7 is focused into the fine aperture 5. Accordingly, the near field light can be effectively radiated from the fine aperture 5.
申请公布号 JP2002006159(A) 申请公布日期 2002.01.09
申请号 JP20010078891 申请日期 2001.03.19
申请人 SEIKO INSTRUMENTS INC 发明人 ARAWA TAKASHI;MITSUOKA YASUYUKI;KATO KENJI;OMI MANABU;KASAMA NOBUYUKI;ICHIHARA SUSUMU
分类号 G02B6/12;G01Q60/18;G01Q70/10;G01Q70/16;G02B6/13;G02B6/24;G02B21/00;G02B21/06;(IPC1-7):G02B6/12 主分类号 G02B6/12
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