摘要 |
PROBLEM TO BE SOLVED: To obtain an optical waveguide probe which is used for scanning-type near field microscopes, low in optical transmission loss, and workable in AFM operation; and its manufacturing method. SOLUTION: The area around the front end of an optical waveguide 2 bends in a direction toward the detecting needle part 9 side with the faces being symmetrical to the surface including the optical axis of the optical waveguied 2. By this, the loss of the transmission light 7 at the bent part 10 is reduced, and the transmission light 7 is focused into the fine aperture 5. Accordingly, the near field light can be effectively radiated from the fine aperture 5. |