ELECTRODEPOSITION DEVICE AND ELECTRODEPOSITION METHOD

摘要

PROBLEM TO BE SOLVED: To provide an electrodeposition apparatus and electrodeposition method which are capable of preventing a continuation defect by detecting the continuation defect by shorting between rear surface electrodes and a conductive substrate and are capable of preventing the occurrence of gouge by early discovering the occurrence of the flow by the film peeling of the oxide sticking to the rear surface electrodes. SOLUTION: The electrodeposition apparatus which electrodeposits the oxide on the conductive substrate 100 is provided with at least >=1 counter electrodes 109 and at least >=1 rear surface electrodes 110 on the side opposite to the counter electrodes 109 across the conductive substrate 100 in electrodeposition baths 111 and has a means for detecting the amount of the oxide sticking to the surface of the rear surface electrodes 110 and/or means for observing the same.