Method and apparatus for localized mechanothermal analysis combined with scanning probe microscopy

摘要

A system and method for performing localized mechanothermal analysis with scanning probe microscopy ("MASM") is disclosed. In a preferred embodiment an image of the surface or subsurface of a sample (104) is created. A localized region of the sample (104) is selected from the image. Using a scanning microscope (103), an active or passive thermal probe is positioned (108) at the selected region. A temperature ramp is applied to the localized region. In addition, a dynamic or modulated stress or strain is applied to the localized region. Force data resulting from the applied temperature and stress or strain is collected and processed to produce a graph or fingerprint of the dynamic mechanical and/or calorimetric properties of the selected localized region.