发明名称 PROBE CARD
摘要 PROBLEM TO BE SOLVED: To provide a probe card reducing a slide amount while securing an even needle pressure and having probes capable of complying with a fine pitch. SOLUTION: The extension bases of the respective probes 10 are arranged regularly in four layers (Lay-1-Lay-4). This is a generally known technique used when a contact area pitch is smaller than a probe wire material diameter (base material diameter). Each probe 10 is provided with a bend part 11 matching the extension from each layer, and a probe tip 12 is brought into contact with each contact area (a pad, a bump, or the like) of an object. An extension part ranging to the bend part 11 of each probe 10 is covered with an insulative coating resin member 13 so as to be fixed.
申请公布号 JP2002005962(A) 申请公布日期 2002.01.09
申请号 JP20000187920 申请日期 2000.06.22
申请人 SEIKO EPSON CORP 发明人 TAMURA RYOHEI
分类号 G01R1/073;H01L21/66;(IPC1-7):G01R1/073 主分类号 G01R1/073
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