发明名称 FLUID CONTROL DEVICE
摘要 <p>PURPOSE: A fluid control device is provided which is easy to assemble and which is readily adapted for the additional installation or modification of lines. CONSTITUTION: A plurality of lines(A, B, C) each comprise a plurality of fluid controllers(3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14) arranged at an upper level and a plurality of coupling members(21, 22) arranged at a lower level, the plurality of lines being arranged in parallel on a base member and having inlets directed in the same direction, with outlets thereof facing toward the same direction, the fluid control device being characterized in that each line is mounted on a line support member, the line support member being mounted on the base member and slidable in a direction orthogonal to the line.</p>
申请公布号 KR20020002335(A) 申请公布日期 2002.01.09
申请号 KR20010038748 申请日期 2001.06.30
申请人 C. K. D. CORP.;FUJIKIN INC.;TOKYO ELECTRON LIMITED 发明人 GOSHIMA KENICHI;HOSHI GEORGE;KAWANO YUJI;KOBAYASHI HIDEO;NAGAYA AKINORI;OKABE TSUNEYUKI;YAMAJI MICHIO;YOSHIKAWA KAZUHIRO
分类号 F15B11/00;F15B1/00;F16K27/00;F17D1/00;F17D3/01;(IPC1-7):F15B1/00 主分类号 F15B11/00
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