| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide an observation method for the fine three-dimensional shape on the surface of a sample using a scanning electron microscope, where the three-dimensional shape on the flat surface of the sample can be observed three-dimensionally and precisely, by using the electron microscope so that the observation is useful for the process control and the quality control of a production process for a product which is manufactured via a rolling process, an extrusion process or the like and which is composed of various plastic materials, especially for a product such as a foil material, a sheet material or the like which is composed of metallic materials. SOLUTION: In the observation method for the fine three-dimensional shape on the surface of the sample using the scanning electron microscope, when the three-dimensional shape on the flat surface of the sample is observed by using the electron microscope, an observation face which is curved at a fine curvature is formed on a place to be observed, the observation face is irradiated with a primary electron beam, and the three-dimensional shape on the surface of the sample is observed.</p> |
