| 摘要 |
PURPOSE: A vacuum acceleration apparatus for vacuum pump is provided to lengthen useful life of the acceleration pump, while maintaining a heat transfer efficiency of the housing. CONSTITUTION: A vacuum acceleration apparatus comprises a cylindrical housing(14) containing an oil(16); an exhaust pipe(26) connected to a side wall of the housing; a heater(18) installed in the lower end of the housing, and which supplies heat by the current; a mass(20) mounted onto the heater; a guide pipe(22) disposed onto the mass and inside of the housing so as to guide flow of the gas; a main jacket(28) formed of a cylindrical shape, and installed at the outer circumference of the housing; a pump connected to the main jacket; and a control unit connected to the pump. An exhaust pipe jacket(30) is installed at the outer circumference of the exhaust pipe, and upper and lower pipes(32,34) are connected between the main jacket and the exhaust pipe jacket.
|
