| 摘要 |
PROBLEM TO BE SOLVED: To provide a thin-film measuring apparatus, in which the measuring area can be made very small and to provide a thin-film measuring apparatus, whose measuring time can be shortened and whose measurement accuracy can be enhanced. SOLUTION: A polarization analyzer 1 is provided with an illumination optical system 10, in which illumination light from a light source 11 is condensed into the very small region P of a sample 2, an image-forming optical system 20 in which the reflected light from a thin film F is guided to a two-dimensional CCD area sensor 27, a polarization-characteristic measuring part 40 in which a change in a polarization state due to reflection is measured, by using quantities of received light in respective light-receiving cells of the area sensor 27 and a thin-film information acquisition part 50, in which information about the film thickness/the film quality of the thin film F is acquired by using its measured result. The optical system 10 and the optical system 20 have their optical axis shared jointly on the sample 2. The respective photoreceptive cells of the area sensor 27 have the same angle of incidenceθ, and they separately and simultaneously receive respective beams of light reflected on the thin film F, with reference to respective beams of incident light advancing toward the very small region P of the thin film F from a plurality of different directions.
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