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发明名称
Ashing method
摘要
申请公布号
GB0127450(D0)
申请公布日期
2002.01.09
申请号
GB20010027450
申请日期
2001.11.15
申请人
SHARP KABUSHIKI KAISHA
发明人
分类号
G03F7/42;H01L21/027;H01L21/302;H01L21/3065
主分类号
G03F7/42
代理机构
代理人
主权项
地址
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