发明名称 |
SCANNER AND LASER BEAM MACHINE |
摘要 |
<p>PROBLEM TO BE SOLVED: To provide a scanner capable of improving machining accuracy by reducing the amplitude of the vibration of a mirror at the time of positioning the mirror. SOLUTION: A mirror mounter 2 holding the mirror 1 is fixed on a rotor 5 by a mounter fixing jig 3 and a mounter fixing screw 4. Weight screws 7 are screwed in two directions orthogonal to the axial center O of the rotation of the mounter 2. By turning the screw 7 in/out of the mounter 2, a position where the amplitude of the vibration of the mirror 1 becomes small in the case of stopping the mirror 1 is obtained and the screw 7 is positioned at the obtained position.</p> |
申请公布号 |
JP2002006255(A) |
申请公布日期 |
2002.01.09 |
申请号 |
JP20000189848 |
申请日期 |
2000.06.23 |
申请人 |
HITACHI VIA MECHANICS LTD |
发明人 |
SAKAMOTO ATSUSHI;AOYAMA HIROSHI;OKUBO YAICHI;MURAKAMI TETSUO;OISHI MASAHIRO;WATANABE FUMIO;TOYAMA SOICHI;OTSUKI HARUAKI |
分类号 |
G02B26/08;B23K26/04;B23K26/06;G02B26/10;(IPC1-7):G02B26/10 |
主分类号 |
G02B26/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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