发明名称 SCANNER AND LASER BEAM MACHINE
摘要 <p>PROBLEM TO BE SOLVED: To provide a scanner capable of improving machining accuracy by reducing the amplitude of the vibration of a mirror at the time of positioning the mirror. SOLUTION: A mirror mounter 2 holding the mirror 1 is fixed on a rotor 5 by a mounter fixing jig 3 and a mounter fixing screw 4. Weight screws 7 are screwed in two directions orthogonal to the axial center O of the rotation of the mounter 2. By turning the screw 7 in/out of the mounter 2, a position where the amplitude of the vibration of the mirror 1 becomes small in the case of stopping the mirror 1 is obtained and the screw 7 is positioned at the obtained position.</p>
申请公布号 JP2002006255(A) 申请公布日期 2002.01.09
申请号 JP20000189848 申请日期 2000.06.23
申请人 HITACHI VIA MECHANICS LTD 发明人 SAKAMOTO ATSUSHI;AOYAMA HIROSHI;OKUBO YAICHI;MURAKAMI TETSUO;OISHI MASAHIRO;WATANABE FUMIO;TOYAMA SOICHI;OTSUKI HARUAKI
分类号 G02B26/08;B23K26/04;B23K26/06;G02B26/10;(IPC1-7):G02B26/10 主分类号 G02B26/08
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