| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a measuring method of a fluid flow whereby a flow can be measured in a wide range by using the entire area of the output characteristics of a flow sensor, and transposition to plural approximate linear characteristics is not required. SOLUTION: If the potential difference of electromotive force produced in the respective thermopiles 32, 33 upstream and downstream in accordance with a quantity of heat transmitted from a micro-heater 34 through a gas is represented by V, the coefficient of sensitivity determined by the structure of a gas passage 17 is represented by (a), the flow of the gas is represented by Q, a quantity of heat taken away from the micro-heater 34 by the gas having the flow Q is represented by a coefficient of heat taking (b)×flow Q, the offset value of the potential difference V appearing under a condition where the flow Q is zero is represented by (c), and a coefficient of thermal sensitivity depending on the installation condition of each thermopile 32, 33 is represented by (d), the flow Q to satisfy a measurement formula of V=alog(Q+d)-(b×Q)+c is calculated, and the flow of the gas running through the gas passage 17 is found based on the flow Q.</p> |
