| 摘要 |
PROBLEM TO BE SOLVED: To measure the temperature of a silicon fused liquid 1 in an infrared image furnace 2 having a halogen lamp 8 as a heating source and growing a silicon single crystal by a floating zone fusing method from the irradiated light of the silicon fused liquid 1 with high precision. SOLUTION: The light going in a specific direction from the silicon fused liquid 1 can be extracted by inserting an optical path tube 3 extending toward the silicon fused liquid 1, thereby the irradiated light from the silicon fused liquid 1 can be extracted by reducing the effect of the incident disturbance light from various directions such as the irradiated light from the halogen lamp 8 and its reflected light and scattered light. The luminance of the extracted light is measured by a CCD(charge coupled device) camera 7, and the temperature is determined from the luminance, thus the temperature can be measured by this simple-structure measuring device with high precision. |
