发明名称 OPTICAL SWITCH AND METHOD FOR MANUFACTURING THE SAME
摘要 PROBLEM TO BE SOLVED: To provide a fiver driving type optical switch to which the optimized method for formation of a V-shaped groove can be applied, in which the fiber, can be positioned and fixed with high accuracy, and moreover, of which the productivity is improved and the price is decreased a low price. SOLUTION: A pair of corner parts (V-shaped groove) is formed by the slopes of a second V-shaped groove 5 formed by alkali etching of the surface of a silicon substrate 2 and by a V-shaped groove constituting substrate 14 made of a transparent glass fixed to cover the second V-shaped groove 5 by anodic joining. A fixed fiber 10 and a movable fiber 7 are mechanically held by the silicon substrate 2 by the corner parts. Thereby, the number of parts is decreased, the fiber is poisoned and fixed with high accuracy, the productivity is improved and a low price is realized.
申请公布号 JP2002006242(A) 申请公布日期 2002.01.09
申请号 JP20000192895 申请日期 2000.06.27
申请人 MITSUBISHI ELECTRIC CORP 发明人 SUEHIRO YOSHIYUKI;FUJITA ATSUSHI;KUMAGAI MUNEHITO;MATSUURA TSUKASA
分类号 G02B26/08;(IPC1-7):G02B26/08 主分类号 G02B26/08
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