| 摘要 |
PROBLEM TO BE SOLVED: To precisely measure a state that there is a possibility of overhang in the contact measurement of a probe, which is moved only in one direction when the shape of a to-be-measured object is measured by the contact of the probe. SOLUTION: In the apparatus, the probe which is moved left and right and vertically is brought into contact with the object to be measured in a state such that it is fixed in one direction, and surface shape data on the object is obtained. An adjusting means, whose side face has a vertical or horizontal state, is arrange in a part corresponding to the probe, and the probe is brought into contact with and fixed to the installation face of the object, in a state such that the vertical face or the horizontal face of the object is brought into contact with and held by the side face of the adjusting means.
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