| 摘要 |
PROBLEM TO BE SOLVED: To make a semiconductor storage container carrying device (handler) easily correspond to carriage of a semiconductor storage container (tray) on the handler without jig replacement or jig adjustment by changing-models or the like. SOLUTION: A suction hand 5 is constituted of a suction pad 4 arranged so that a suction port is positioned at a center of a square elastic body and a spring 6 to push the suction pad 4 on. The suction pad 4 is made to suck the tray by moving the suction hand 5 to a position to make contact with an upper surface of a circumference of an IC pocket 2 of the tray and to close the shielded IC pocket 2. The suction hand is set on a robot with its position setting changeable. Even an object having suck a complicated surface shape as a tray has the tray can obtain large suction regardless of its suction diameter. In addition, model change can manage with change of position setting alone and can dispense with mechanical adjustment, jig replacement and the like. |
