| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for drilling a member made of a silicon capable of enhancing an accuracy of hole dimensions such as a position and a diameter and reducing a surface roughness of an inner surface of the hole. SOLUTION: In the case of drilling the hole 2 of a microscopic diameter in the member 1 made of the silicon, a drill 5 having a drill part 3 in which a shape of an envelope contacted with a ridge of its side face exhibits a regular prismatic state substantially equal to a section of the hole and which is made of a single stone diamond in which its distal end 3a is formed in a regular pyramidal state, is used to drill.
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