METHOD FOR CLEANING PLATE-LIKE MEMBER AND CLEANING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a method for cleaning a plate-like member by which only one of the sides of the plate-like member such as a reticle is cleaned as well as a cleaning device. SOLUTION: The tip part of a brush curtain (a liquid shielding member) 12 is brought into contact with the ends of the reticle (the plate-like member) 10. Next, the reticle 10 is arranged in a cleaning chamber 20 in such a state that a liquid is prevented from being scattered from the lower side space to the upper side space of the reticle 10 by means of the brush curtain 12. In this case, the side to which the reticle 10 is applied is set facing upward. Then the lower side of the reticle 10 is cleaned using a cleaning liquid and a sponge scrubber 13 to remove a soil and pure water is sprayed from a pure water spray nozzle 17 to wash off the cleaning liquid.