| 摘要 |
PROBLEM TO BE SOLVED: To provide a ELID grinding device for fine shape processing capable of giving a sufficiently small processing resistance, thereby capable of processing ultrafine pins, such as fine parts having a diameter of 100μm or below, narrow parts having a large aspect ratio, and specially shaped parts having a cross section of special shape. SOLUTION: This grinding device comprises a conductive grinding tool 2 rotatively driven around the vertical Z-axis, a X-Y table 4 for moving a work 1 in a horizontal X-Y plane, an electrolysis electrode 6 provided close to the outer surface of the grinding tool 2 and freely rotatable around the Z-axis, and an electrode guide device 8 for guiding the electrode 6 to a position apart from the workpiece 1, wherein the workpiece 1 is moved and processed in contact with the grinding tool 2, while a conductive grinding fluid being allowed to flow between the electrode 6 and the grinding tool 2 and the grinding tool 2 being dressed with the electrolysis dressing. The electrode guide device 8 is composed of two contact members 8a fixed at the end to the electrolysis electrode 6, each contact member 8a extending in the direction of the diameter with the Z-axis as its center and with a space from the grinding tool 2 and the workpiece 1, and nipping a part of the workpiece 1 with a space.
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