发明名称 |
Thin film forming equipment and method |
摘要 |
A thin film forming equipment and a method for forming thin films are provided which are capable of forming the thin film of high quality and of effectively preventing CVD material gas from leaking to surroundings at a low cost. The thin film equipment contains a substrate, a substrate holding device used to hold the substrate and a device used to provide an atmospheric gas to a surface of the substrate held by the substrate holding device, wherein an upper face of the substrate held by the substrate holding device and an upper face of the substrate holding device are almost on one plane.
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申请公布号 |
US6336975(B1) |
申请公布日期 |
2002.01.08 |
申请号 |
US20000533244 |
申请日期 |
2000.03.22 |
申请人 |
NEC CORPORATION |
发明人 |
MORISHIGE YUKIO;OMIYA MAKOTO |
分类号 |
H01L21/268;C23C16/04;C23C16/16;C23C16/44;C23C16/455;C23C16/48;(IPC1-7):C23C16/00;H01L21/31;H01L21/205 |
主分类号 |
H01L21/268 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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