Multilayered ceramic substrate and method of producing the same

摘要

A multilayered ceramic substrate which includes at least two types of ceramic layers respectively containing different ceramic materials, and which can be produced by simultaneous firing without causing layer peeling is described. A green composite laminated product is prepared in a state in which two substrate green sheets respectively contain different types of low-temperature sintered ceramic materials, and a shrinkage inhibiting green sheet containing an inorganic material which is not sintered at the sintering temperature of each of the low-temperature sintered ceramic material is arranged between the two substrate green sheets, followed by firing. In the firing step, the low-temperature sintered ceramic materials are sintered while inhibiting shrinkage of the substrate green sheets in the direction parallel to the main surfaces thereof by the shrinkage inhibiting green sheet, while the inorganic material remains unsintered and is fixed by glass supplied by firing the low-temperature sintered ceramic materials.