| 摘要 |
A conveying system for transporting wafers in clean rooms, the conveying system is configured as a transporting store and connects a plurality of processing centers for processing the wafers. Secondary conveying systems branch off from the conveying system and form supply buffers. In each case one secondary conveying system leads to at least one processing center from which a predetermined number of wafers can be removed, and fed to the processing center, optionally by use of at least one handling unit.
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