APPARATUS AND METHOD FOR FEEDING SPHERICAL OBJECT

摘要

PROBLEM TO BE SOLVED: To provide an apparatus or a method for feeding a spherical object such as spherical single crystal silicon particles into a specified treating apparatus by allowing the particles to fall by gravity in a manner that they are spaced from each other at a specified distance so as to avoid their contact. SOLUTION: There is provided a feeding apparatus 10 used for feeding single crystal silicon particles 11 into a resist step and provided with a pipe capable of vertically guiding the single crystal silicon particles; a first regulation means provided in a specified position in the pipe and used for regulating the free fall of the single crystal silicon particles; and a second regulating means provided in a position downstream of the first regulating means in the pipe, wherein the first and second regulating means can be independently operated.