发明名称 |
Method for optimizing matching network of semiconductor process apparatus |
摘要 |
A method for optimizing matching network between an output impedance and an input impedance in a semiconductor process apparatus is disclosed. The method includes the steps of: providing a neural network capable of being trained through repeated learning; training the neural network from previously performed process conditions; setting up an initial value; comparing the initial value with a theoretically calculated value, to obtain error between the values; and repeating the training, setting, and comparing steps until the error becomes zero.
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申请公布号 |
US6338052(B1) |
申请公布日期 |
2002.01.08 |
申请号 |
US19980104108 |
申请日期 |
1998.06.25 |
申请人 |
HYUNDAI ELECTRONICS INDUSTRIES CO., LTD. |
发明人 |
BAE KOON HO |
分类号 |
G05B13/02;H03H7/40;(IPC1-7):G06N3/02 |
主分类号 |
G05B13/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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