| 发明名称 |
Method to test devices on high performance ULSI wafers |
| 摘要 |
An apparatus for testing structures in semiconductor wafers. The apparatus includes at least one test probe. At least one tool measures and controls deceleration of the at least one test probe as it approaches a surface of a structure in the semiconductor wafer.
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| 申请公布号 |
US6337218(B1) |
申请公布日期 |
2002.01.08 |
| 申请号 |
US19990321921 |
申请日期 |
1999.05.28 |
| 申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
UZOH CYPRIAN E.;COHEN STEPHEN A.;HALPERIN ARNOLD |
| 分类号 |
G01R1/067;G01R31/28;G01R31/311;G01R31/312;(IPC1-7):H01L21/66 |
主分类号 |
G01R1/067 |
| 代理机构 |
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代理人 |
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