Mounting head apparatus and mounting method

摘要

A mounting head apparatus for adsorbing and moving a sheet member to a position above an object on which the sheet member is to be mounted and mounting the adsorbed sheet member on the object includes an adsorbing portion having a plurality of adsorbing openings formed at the leading end thereof; a connection chamber to which the adsorbing portion is joined and which is formed into a space for connecting the base portions of the plural adsorbing openings to one another; a dividing unit disposed in the connection chamber and arranged to divide the internal space of the connection chamber into a plurality of sections; and a pressure reducing unit connected to the connection chamber and arranged to reduce the pressure in the connection chamber, wherein adsorbing force is generated from a portion of the plural adsorbing openings in a predetermined region when the dividing unit divides the inside portion of the connection chamber at a predetermined position and the pressure in at least one of the divided connection chambers is reduced by the pressure reducing unit.