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发明名称
摘要
申请公布号
JP3243973(B2)
申请公布日期
2002.01.07
申请号
JP19950160430
申请日期
1995.06.27
申请人
发明人
分类号
H01L21/60;G02F1/1345;(IPC1-7):H01L21/60;G02F1/134
主分类号
H01L21/60
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